Statistics
Publications
1
Citations
18
H-Index
1
Active since
2008
Affiliations
Elodie Sungauer is an author at Laboratoire des Technologies de la Microélectronique specializing in metal gates, engineering, and etching processes.
Publications per year
2008–2008
1
1
Plasma etching of HfO2 in metal gate CMOS devices
Elodie Sungauer, X. Mellhaoui, E. Pargon et al. · Microelectronic Engineering · 2008 · 18 citations
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