Concepedia
1
Publications
30
Citations
H-Index
1977
Active since
Affiliations
NTT (Japan)(Current)
Yumiko Takehara is an author at NTT (Japan) specializing in engineering, applied physics, and surface science.
Top concepts
EngineeringApplied PhysicsSurface Science
Publications per year
1977–1977
Preferential SiO<sub>2</sub>Etching on Si Substrate by Plasma Reactive Sputter Etching
Seitaro Matsuo, Yumiko Takehara · Japanese Journal of Applied Physics · 1977 · 30 citations
Si Substrate, Engineering, Surface Science +3
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