Concepedia

Dnyanesh Tamboli

DT

7

Publications

303

Citations

7

H-Index

1999

Active since

Affiliations

University of Central Florida(Current)

Materials Processing (United States)

Air Products (United States)

Dnyanesh Tamboli is an author at University of Central Florida specializing in chemical engineering, materials science, and engineering.

Top concepts

Publications per year

1999–2010

7

Publications

7

Mechanism of Copper Removal during CMP in Acidic H[sub 2]O[sub 2] Slurry

T. Du, Dnyanesh Tamboli, V. Desai et al. · Journal of The Electrochemical Society · 2004 · 101 citations

, , +19

Studies on passivation behavior of tungsten in application to chemical mechanical polishing

Dnyanesh Tamboli, Sudipta Seal, V. Desai et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 50 citations

, , +21

Novel Interpretations of CMP Removal Rate Dependencies on Slurry Particle Size and Concentration

Dnyanesh Tamboli, Goutam Banerjee, Malcolm Waddell · Electrochemical and Solid-State Letters · 2004 · 43 citations

, , +24

Electrochemical characterization of copper chemical mechanical polishing

Tianbao Du, Dnyanesh Tamboli, Vimal Desai · Microelectronic Engineering · 2003 · 40 citations

, , +7

Electrochemical characterization of copper chemical mechanical planarization in KIO3 slurry

Tianbao Du, Dnyanesh Tamboli, Ying Luo et al. · Applied Surface Science · 2004 · 29 citations

, , +8

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