Statistics
Publications
6
Citations
331
H-Index
6
Active since
1965
Affiliations
NTT (Japan)(Current)
Osamu Ochi is an author at NTT (Japan) specializing in materials science, engineering, and semiconductor devices.
Publications per year
1965–1981
6
6
A new inorganic electron resist of high contrast
Akira Yoshikawa, Osamu Ochi, Haruo Nagai et al. · Applied Physics Letters · 1977 · 82 citations
Natural Sciences, Materials Engineering, Materials Science +17
Angstroms Resolution in Se-Ge Inorganic Photoresists
Akira Yoshikawa, Shoichi Hirota, Osamu Ochi et al. · Japanese Journal of Applied Physics · 1981 · 21 citations
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