Osamu Ochi

A novel inorganic photoresist utilizing Ag photodoping in Se-Ge glass films

Akira Yoshikawa, Osamu Ochi, Haruo Nagai et al. · Applied Physics Letters · 1976 · 104 citations

Materials Science, Microfabrication Technology, Glass-ceramic +14

A new inorganic electron resist of high contrast

Akira Yoshikawa, Osamu Ochi, Haruo Nagai et al. · Applied Physics Letters · 1977 · 82 citations

Thin Ag Film, Engineering, Glass Material +16

Dry development of Se-Ge inorganic photoresist

Akira Yoshikawa, Osamu Ochi, Yoshihiko Mizushima · Applied Physics Letters · 1980 · 64 citations

Materials Science, Rate Differences, Electronic Materials +14

New application of Se-Ge glasses to silicon microfabrication technology

Haruo Nagai, Akira Yoshikawa, Yoshio Toyoshima et al. · Applied Physics Letters · 1976 · 48 citations

Engineering, Optical Glass, Se-ge Glass +16

Angstroms Resolution in Se-Ge Inorganic Photoresists

Akira Yoshikawa, Shoichi Hirota, Osamu Ochi et al. · Japanese Journal of Applied Physics · 1981 · 21 citations

Optical Materials, Engineering, High Resolution +19