Peter Roediger

Evaluation of chamber contamination in a scanning electron microscope

Peter Roediger, Heinz D. Wanzenboeck, G. Hochleitner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +9

Focused-ion-beam-inflicted surface amorphization and gallium implantation—new insights and removal by focused-electron-beam-induced etching

Peter Roediger, Heinz D. Wanzenboeck, Simon Waid et al. · Nanotechnology · 2011 · 29 citations

Engineering, Materials Engineering, Materials Science +17

Novel method for cleaning a vacuum chamber from hydrocarbon contamination

Heinz D. Wanzenboeck, Peter Roediger, G. Hochleitner et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2010 · 28 citations

Natural Sciences, Chemical Engineering, Chemistry +16

Temporal Stability of Y–Ba–Cu–O Nano Josephson Junctions from Ion Irradiation

Shane A. Cybart, Peter Roediger, Ke Chen et al. · IEEE Transactions on Applied Superconductivity · 2012 · 20 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Focused electron beam induced etching of silicon using chlorine

Peter Roediger, G. Hochleitner, E. Bertagnolli et al. · Nanotechnology · 2010 · 16 citations

Engineering, Materials Engineering, Materials Science +16