Angela Guerry

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Active since

2002

Affiliations

National Institute of Standards and Technology(Current)

Angela Guerry is an author at National Institute of Standards and Technology specializing in materials characterization, instrumentation, and critical dimension metrology.

Publications per year

2002–2004

Publications

Reference metrology using a next-generation CD-AFM

Ronald G. Dixson, Angela Guerry · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 28 citations

Engineering, Manufacturing Engineering, Instrumentation +16

Implementation of Reference Measurement System using CD-AFM

Ronald G. Dixson, Angela Guerry, Marylyn H. Bennett et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 25 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Toward traceability for at-line AFM dimensional metrology

Ronald G. Dixson, Angela Guerry, Marylyn H. Bennett et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 16 citations

Engineering, Manufacturing Engineering, Materials Science +17

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