D.E. Glumac

High-displacement piezoelectric actuator utilizing a meander-line geometry I. Experimental characterization

W.P. Robbins, D.L. Polla, D.E. Glumac · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1991 · 57 citations

Applications of PZT and Related Thin Films in Piezoelectric Microsensors

D.L. Polla, Changyu Ye, P. Schiller et al. · MRS Proceedings · 1991 · 40 citations

Materials Science, Engineering, Sensors +7

Design of linear-motion microactuators using piezoelectric thin films

W.P. Robbins, D.L. Polla, T. Tamagawa et al. · Journal of Micromechanics and Microengineering · 1991 · 26 citations

Engineering, Mechanical Engineering, Microactuator +16

High resolution 50 nm linear displacement macroscale meander-line PZT actuator

Nabeel A. Riza, D.L. Polla, W.P. Robbins et al. · Electronics Letters · 1993 · 17 citations

A planar unimorph-based actuator with large vertical displacement capability. I. Experiment

D.E. Glumac, W.P. Robbins · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1998 · 12 citations

Engineering, Mechanical Engineering, Microactuator +22