P. Schiller is an author at University of Minnesota specializing in engineering, thin films, and applied physics.
Top concepts
EngineeringThin FilmsApplied PhysicsSensor DesignMaterial ScienceMicroelectronicsMicrofabricationElectrical EngineeringFerroelectric MaterialsSensors
Publications per year
1991–2002
4
4
Applications of PZT and Related Thin Films in Piezoelectric Microsensors
D.L. Polla, Changyu Ye, P. Schiller et al. · MRS Proceedings · 1991 · 40 citations
Properties of piezoelectric thin films for micromechanical devices and systems
W. Tjhen, T. Tamagawa, C.-P. Ye et al. · 2002 · 36 citations
Engineering, Mechanical Engineering, Piezoelectric Coefficients +18
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