Concepedia

Sanjay Patel

SP

Statistics

Publications

2

Citations

44

H-Index

2

Active since

1995

Affiliations

AT&T (United States)(Current)

Sanjay Patel is an author at AT&T (United States) specializing in control system engineering, engineering, and control systems.

Top concepts

EngineeringFlow ControlControl DesignControl SystemsProcess ControlMicroelectronicsControl EngineeringSystems EngineeringComputer EngineeringElectrical Engineering

Publications per year

1995–2014

2

Publications

2

Learning accurate and interpretable models based on regularized random forests regression

Sheng Liu, Shamitha Dissanayake, Sanjay Patel et al. · BMC Systems Biology · 2014 · 32 citations · Full text

A production demonstration of wafer-to-wafer plasma gate etch control by adaptive real-time computation of the over-etch time from in situ process signals

Edward A. Rietman, Sanjay Patel · IEEE Transactions on Semiconductor Manufacturing · 1995 · 12 citations

Engineering, Flow Control, Real-time Process Signatures +20

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