Concepedia

R.C. Ellwanger

RE

3

Publications

169

Citations

3

H-Index

1986

Active since

Affiliations

IPS Research (United States)(Current)

R.C. Ellwanger is an author at IPS Research (United States) specializing in materials science, engineering, and applied physics.

Top concepts

Publications per year

1986–1989

3

Publications

3

A correlation of Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and Rutherford backscattering spectrometry measurements on sputter‐deposited titanium nitride thin films

Brad J. Burrow, A. E. Morgan, R.C. Ellwanger · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 115 citations

, , +20

The deposition and film properties of reactively sputtered titanium nitride

R.C. Ellwanger, Janet M. Towner · Thin Solid Films · 1988 · 42 citations

, , +8

A high throughput blanket tungsten process based on H2/WF6 chemistry

Jurriaan Schmitz, A.J.M. Van Dijk, J.L.G. Suijker et al. · Applied Surface Science · 1989 · 12 citations

, , +6

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