Statistics
Publications
1
Citations
41
H-Index
1
Active since
1995
Affiliations
Fujitsu (Japan)(Current)
T. Uematsu is an author at Fujitsu (Japan) specializing in semiconductor materials, sputtering, and amorphous silicon.
Publications per year
1995–1995
1
1
Polycrystalline silicon formed by ultrahigh-vacuum sputtering system
Y. Mishima, M. Takei, T. Uematsu et al. · Journal of Applied Physics · 1995 · 41 citations
Natural Sciences, Materials Engineering, Materials Science +17
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