Concepedia

Shigekazu Kieda

SK

Statistics

Publications

2

Citations

172

H-Index

2

Active since

1990

Affiliations

University of Minnesota(Current)

Shigekazu Kieda is an author at University of Minnesota specializing in heat transfer, engineering, and physical chemistry.

Publications per year

1990–1993

2

Publications

2

Transport phenomena in vertical reactors for metalorganic vapor phase epitaxy

Dimitrios I. Fotiadis, Shigekazu Kieda, Klavs F. Jensen · Journal of Crystal Growth · 1990 · 154 citations

Engineering, Materials Engineering, Materials Science +9

Temperature distribution in semiconductor wafers heated in a vertical diffusion furnace

Shigeki Hirasawa, Shigekazu Kieda, Tetsuo Watanabe et al. · IEEE Transactions on Semiconductor Manufacturing · 1993 · 18 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

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