Statistics
Publications
6
Citations
106
H-Index
6
Active since
2008
Affiliations
T. van de Peut is an author at Mapper Lithography (Netherlands) specializing in electrical engineering, engineering, and electron beam lithography.
Publications per year
2008–2011
6
6
Demonstration of real-time pattern correction for high-throughput maskless lithography
Edwin Hakkennes, A. D. Wiersma, M. Hoving et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 10 citations
Engineering, Computer Engineering, Electrical Engineering +13
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