Concepedia

Naomu Kitano

NK

Statistics

Publications

4

Citations

64

H-Index

4

Active since

2007

Affiliations

The University of Osaka(Current)

Canon Anelva (Japan)

National Institute of Advanced Industrial Science and Technology

Naomu Kitano is an author at The University of Osaka specializing in gate dielectrics, materials science, and semiconductor devices.

Publications per year

2007–2010

4

Publications

4

Charge trapping properties in TiO2∕HfSiO∕SiO2 gate stacks probed by scanning capacitance microscopy

Yuichi Naitou, Hiroaki Arimura, Naomu Kitano et al. · Applied Physics Letters · 2008 · 18 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Excellent electrical properties of TiO2∕HfSiO∕SiO2 layered higher-k gate dielectrics with sub-1nm equivalent oxide thickness

Hiroaki Arimura, Naomu Kitano, Yuichi Naitou et al. · Applied Physics Letters · 2008 · 18 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Impact of Physical Vapor Deposition-Based In situ Fabrication Method on Metal/High-k Gate Stacks

Heiji Watanabe, Shinya Horie, T. Minami et al. · Japanese Journal of Applied Physics · 2007 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication of advanced La-incorporated Hf-silicate gate dielectrics using physical-vapor-deposition-based <i>in situ</i> method and its effective work function modulation of metal/high-k stacks

Hiroaki Arimura, Yudai Oku, Masayuki Saeki et al. · Journal of Applied Physics · 2010 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

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