John T. Hachman

High aspect ratio patterning with a proximity ultraviolet source

Paul M. Dentinger, Karen Lee Krafcik, Kelby L. Simison et al. · Microelectronic Engineering · 2002 · 61 citations

Engineering, Materials Engineering, Physics +13

<title>Fabrication of miniaturized electrostatic deflectors using LIGA</title>

Keith Jackson, Chantal G. Khan Malek, Lawrence P. Murray et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 50 citations

Engineering, Electrical Engineering, Materials Science +12

Electrodeposition of Ni from Low-Temperature Sulfamate Electrolytes

James J. Kelly, S.H. Goods, A. Alec Talin et al. · Journal of The Electrochemical Society · 2006 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +17

Experimental Study of the Microstructure and Stress of Electroplated Gold for Microsystem Applications

James J. Kelly, Nancy Yang, T.J. Headley et al. · Journal of The Electrochemical Society · 2003 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

<title>Transport limitations in electrodeposition for LIGA microdevice fabrication</title>

Stewart K. Griffiths, R. H. Nilson, Robert Bradshaw et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 18 citations

Engineering, Materials Engineering, Materials Science +17