Statistics
Publications
24
Citations
417
H-Index
14
Active since
2007
Noriyuki Unno is an author at Tokyo University of Science specializing in engineering, materials science, and microfabrication.
Publications per year
2007–2023
24
24
Risako Kibushi, Kazuhisa Yuki, Noriyuki Unno et al. · International Journal of Heat and Mass Transfer · 2021 · 39 citations
Sub-100-nm three-dimensional nanoimprint lithography
Noriyuki Unno, Jun Taniguchi, Yoshiaki Ishii · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 32 citations
Materials Science, Electrical Engineering, Dual Damascene Process +14
1–5 of 24