Tanzia Chowdhury

Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules

Tanzia Chowdhury, Romel Hidayat, Tirta Rona Mayangsari et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 35 citations

Engineering, Computational Chemistry, Chemistry +19

Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study

Romel Hidayat, Hye-Lee Kim, Khabib Khumaini et al. · Physical Chemistry Chemical Physics · 2023 · 19 citations

Density functional theory study on the selective capping of cobalt on copper interconnect

Khabib Khumaini, Romel Hidayat, Tirta Rona Mayangsari et al. · Applied Surface Science · 2022 · 15 citations

Materials Science, Engineering, Copper Interconnect +9

Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

Romel Hidayat, Tanzia Chowdhury, Yewon Kim et al. · Applied Surface Science · 2020 · 14 citations

Materials Engineering, Materials Science, Engineering +9

Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules

Tanzia Chowdhury, Romel Hidayat, Hye-Lee Kim et al. · Applied Surface Science · 2021 · 14 citations

Materials Science, Surface Characterization, Engineering +11