Luchana L. Yusup

Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor

Jaemin Park, Se Jin Jang, Luchana L. Yusup et al. · ACS Applied Materials & Interfaces · 2016 · 56 citations

Materials Science, Engineering, Peald Film +14

Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride

Luchana L. Yusup, Jaemin Park, Yong-Ho Noh et al. · RSC Advances · 2016 · 41 citations

Engineering, Chemistry, Chemical Deposition +20

Surface reaction of silicon chlorides during atomic layer deposition of silicon nitride

Luchana L. Yusup, Jaemin Park, Tirta Rona Mayangsari et al. · Applied Surface Science · 2017 · 33 citations

Materials Science, Engineering, Silicon Chlorides +9

Study of surface reaction during selective epitaxy growth of silicon by thermodynamic analysis and density functional theory calculation

Tirta Rona Mayangsari, Luchana L. Yusup, Jaemin Park et al. · Journal of Crystal Growth · 2017 · 17 citations

Materials Science, Materials Engineering, Thermodynamic Analysis +10

Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride

Tirta Rona Mayangsari, Luchana L. Yusup, Romel Hidayat et al. · Applied Surface Science · 2020 · 13 citations

Materials Science, Engineering, Corrosion +9