Concepedia

Matthias Boehringer

MB

2

Publications

36

Citations

2

H-Index

2002

Active since

Affiliations

Robert Bosch (Germany)(Current)

Matthias Boehringer is an author at Robert Bosch (Germany) specializing in integrated circuits, chemical engineering, and engineering.

Top concepts

Publications per year

2002–2012

2

Publications

2

Porous Silicon in a Semiconductor Manufacturing Environment

Matthias Boehringer, H. Artmann, Kevin Witt · Journal of Microelectromechanical Systems · 2012 · 26 citations

Improved copper detection in hydrofluoric acid by recombination lifetime measurements on dedicated silicon substrates

Matthias Boehringer, J. Hauber · Applied Physics Letters · 2002 · 10 citations

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