R. Liu

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Active since

2003

Affiliations

National University of Singapore(Current)

R. Liu is an author at National University of Singapore specializing in depth profiling, high-temperature plasmas, and secondary ion mass spectrometry.

Publications per year

2003–2003

Publications

Investigation of boron penetration through decoupled plasma nitrided gate oxide using backside secondary ion mass spectrometry depth profiling

K. L. Yeo, Andrew T. S. Wee, R. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 11 citations

Natural Sciences, Electrical Engineering, Materials Science +16

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