S.E. Rock

Investigation of Percarbonate Based Slurry Chemistry for Controlling Galvanic Corrosion during CMP of Ruthenium

Michael Türk, S.E. Rock, H. P. Amanapu et al. · ECS Journal of Solid State Science and Technology · 2013 · 55 citations

Engineering, Controlling Galvanic Corrosion, Chemistry +16

Thermophysical Properties and Proton Transport Mechanisms of Trialkylammonium and 1-Alkyl-1<i>H</i>-imidazol-3-ium Protic Ionic Liquids

Janice L. Lebga‐Nebane, S.E. Rock, Joshua Franclemont et al. · Industrial & Engineering Chemistry Research · 2012 · 46 citations

Engineering, Nmr Spectroscopy, Chemistry +17

Electrochemical investigation of the surface-modifying roles of guanidine carbonate in chemical mechanical planarization of tantalum

S.E. Rock, D.J. Crain, J. P. Zheng et al. · Materials Chemistry and Physics · 2011 · 44 citations

Materials Science, Electrochemical Investigation, Chemical Engineering +9

Minimizing the effects of galvanic corrosion during chemical mechanical planarization of aluminum in moderately acidic slurry solutions

Xiaoyang Shi, S.E. Rock, Michael Türk et al. · Materials Chemistry and Physics · 2012 · 39 citations

Materials Science, Chemical Engineering, Corrosion Protection +11

Surface-complex films of guanidine on tantalum nitride electrochemically characterized for applications in chemical mechanical planarization

S.E. Rock, D.J. Crain, C.M. Pettit et al. · Thin Solid Films · 2011 · 31 citations

Materials Science, Chemical Engineering, Engineering +10