Concepedia
1
Publications
78
Citations
H-Index
2002
Active since
Affiliations
Keio University(Current)
Gentaro Washio is an author at Keio University specializing in microfabrication, engineering, and applied physics.
Top concepts
PhysicsEngineeringApplied PhysicsMicroelectronicsMicrofabricationElectrical Engineering
Publications per year
2002–2002
Functional design of a pulsed two-frequency capacitively coupled plasma in CF4/Ar for SiO2 etching
K. Maeshige, Gentaro Washio, Takashi Yagisawa et al. · Journal of Applied Physics · 2002 · 78 citations
Electrical Engineering, Two-frequency Ccp, Functional Design +12
Rows per page
1–1 of 1