Concepedia

Takanori Akita

TA

3

Publications

62

Citations

3

H-Index

2018

Active since

Affiliations

Tokyo University of Science(Current)

Takanori Akita is an author at Tokyo University of Science specializing in materials science, microfluidics, and microfabrication.

Top concepts

EngineeringMicrofluidicsSurface ScienceMaterial ScienceMicrofabricationCorrosionElectrochemistryMicroelectronicsChemical EngineeringChemistry

Publications per year

2018–2020

3

Publications

3

Transitional Additive Adsorption with Co-Addition of Suppressor and Leveler for Copper TSV Filling

Mineyoshi Tomie, Takanori Akita, Masaru Irita et al. · Journal of The Electrochemical Society · 2020 · 29 citations · Full text

Materials Science, Chemical Engineering, Microfluidic Device +15

Observation of the Behavior of Additives in Copper Electroplating Using a Microfluidic Device

Takanori Akita, Mineyoshi Tomie, Ryo Ikuta et al. · Journal of The Electrochemical Society · 2018 · 18 citations · Full text

Materials Science, Electrometallurgy, Chemical Engineering +15

Microfluidic Device for In Situ Observation of Bottom-Up Copper Electrodeposition in a TSV-Like Structure

Takanori Akita, Otsuka Yuki, Masanori Hayase · Journal of The Electrochemical Society · 2020 · 15 citations

Engineering, Flow Cell, Biomedical Engineering +20

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