Werner Klug

Substantial progress in optical monitoring by intermittent measurement technique

Alfons Zoeller, Michael Boos, Rainer Goetzelmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 30 citations

Optical Materials, Engineering, Measurement +23

Ion-assisted deposition with a new plasma source

K. Matl, Werner Klug, A. Zöller · Materials Science and Engineering A · 1991 · 25 citations

Plasma Processing, Applied Physics, Plasma Application +1

Plasma-ion-assisted deposition: a powerful technology for the production of optical coatings

Alfons Zoeller, Rainer Goetzelmann, Harro Hagedorn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 24 citations

Optical Materials, Optical Technologies, Engineering +23

High accurate in-situ optical thickness monitoring

Alfons Zoeller, Michael Boos, Harro Hagedorn et al. · Optical Interference Coatings · 2004 · 12 citations

Photonics, Optical Materials, Engineering +12