Rainer Goetzelmann

Substantial progress in optical monitoring by intermittent measurement technique

Alfons Zoeller, Michael Boos, Rainer Goetzelmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 30 citations

Optical Materials, Engineering, Measurement +23

Plasma ion-assisted deposition: a novel technique for the production of optical coatings

Alfons Zoeller, S. Beißwenger, Rainer Goetzelmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 26 citations

Optical Materials, Engineering, Optical Coatings +19

Plasma-ion-assisted deposition: a powerful technology for the production of optical coatings

Alfons Zoeller, Rainer Goetzelmann, Harro Hagedorn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 24 citations

Optical Materials, Optical Technologies, Engineering +23

Nonlinear absorption of thin Al_2O_3 films at 193 nm

Oliver Apel, Klaus Mann, Alfons Zoeller et al. · Applied Optics · 2000 · 21 citations

Materials Science, Thin Al2o3 Films, Aluminium Nitride +12

Accuracy and error compensation with direct monochromatic monitoring

Alfons Zoeller, Michael Boos, Rainer Goetzelmann et al. · Optical Interference Coatings · 2013 · 13 citations

Engineering, Layer Thickness Accuracy, Measurement +19