Concepedia
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Publications
2
Citations
37
H-Index
Active since
2003
Affiliations
Chinese Academy of Sciences(Current)
Shanghai Institute of Microsystem and Information Technology
Qinwo Shen is an author at Chinese Academy of Sciences specializing in natural sciences, materials science, and materials engineering.
Publications per year
2003–2003
Microstructure and crystallinity of porous silicon and epitaxial silicon layers fabricated on p+ porous silicon
Weili Liu, Xinying Xie, Miao Zhang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 19 citations
Natural Sciences, Materials Engineering, Materials Science +17
Preparation of hafnium oxide thin film by electron beam evaporation of hafnium incorporating a post thermal process
Su Xing, Ninglin Zhang, Zhitang Song et al. · Microelectronic Engineering · 2003 · 18 citations
Natural Sciences, Materials Engineering, Materials Science +12
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