Concepedia

C. A. M. de Vries

CA

3

Publications

56

Citations

3

H-Index

1985

Active since

Affiliations

Philips (Netherlands)(Current)

C. A. M. de Vries is an author at Philips (Netherlands) specializing in engineering, microelectronics, and electrical engineering.

Top concepts

EngineeringMicroelectronicsElectrical EngineeringApplied PhysicsInstrumentationElectronic PackagingPhysicsPulse PowerElectron DensityElectrophysiology

Publications per year

1985–1987

3

Publications

3

Power loss mechanisms in radio frequency dry etching systems

W. G. M. van den Hoek, C. A. M. de Vries, M. G. J. Heijman · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 25 citations

Low-power Electronics, Electrical Engineering, Energy Harvesting +13

Microwave spectroscopic measurement of the electron density in a planar discharge: Relation to reactive-ion etching of silicon oxide

C. A. M. de Vries, A. J. van Roosmalen, G. C. C. Puylaert · Journal of Applied Physics · 1985 · 18 citations

Electron Density, Electrical Engineering, Planar Discharge +13

Validity of self-bias voltage measurements on insulating electrodes in radio-frequency dry etching systems

C. A. M. de Vries, W. G. M. van den Hoek · Journal of Applied Physics · 1985 · 13 citations

Electrical Engineering, Plasma Electronics, Engineering +11

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