Eloi Marigó

Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

A. Uranga, J. Verd, Eloi Marigó et al. · Sensors and Actuators A Physical · 2013 · 61 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Integration of NEMS resonators in a 65nm CMOS technology

J.L. Muñóz-Gamarra, P. Alcaine, Eloi Marigó et al. · Microelectronic Engineering · 2013 · 33 citations

Engineering, Electrical Engineering, Microelectronics +12

Zero-level packaging of MEMS in standard CMOS technology

Eloi Marigó, J.L. López, Gonzalo Murillo et al. · Journal of Micromechanics and Microengineering · 2010 · 19 citations · Full text

Engineering, Electrical Engineering, Microelectronics +16

Multi-Frequency Imaging with a CMOS Compatible Scandium Doped Aluminum Nitride PMUT Array

Margo Billen, Hang Gao, Dries Tabruyn et al. · 2021 · 19 citations

Medicine, Biomedical Engineering, Microelectromechanical Systems +16

A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators

J. Giner, A. Uranga, J.L. Muñóz-Gamarra et al. · Journal of Micromechanics and Microengineering · 2012 · 17 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16