Integration of NEMS resonators in a 65nm CMOS technology - Concepedia

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Integration of NEMS resonators in a 65nm CMOS technology

33

Citations

11

References

2013

Year

J.L. Muñóz-Gamarra, P. Alcaine, Eloi Marigó, J. Giner, A. Uranga, J. Estéve, N. Barniol

Microelectronic Engineering

Electrical EngineeringEngineeringNano Electro Mechanical SystemNems ResonatorsMicroelectronicsElectronic Circuit

References

	Year	Citations

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