Concepedia

M. Blume

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Publications

1

Citations

34

H-Index

1

Active since

2001

Affiliations

Friedrich Schiller University Jena(Current)

M. Blume is an author at Friedrich Schiller University Jena specializing in microfabrication, nanolithography, and nanotechnology.

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Publications per year

2001–2001

1

Publications

1

On-line nanolithography using electron beam-induced deposition technique

Uwe Hübner, R. Plontke, M. Blume et al. · Microelectronic Engineering · 2001 · 34 citations

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