Mamoru Kohata

Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

Shinei MINETA, Mamoru Kohata, Nobuo Yasunaga et al. · Thin Solid Films · 1990 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +12

Preparation of aluminum oxide films by ion beam assisted deposition

Ippei Shimizu, Yuichi Setsuhara, Shoji Miyake et al. · Surface and Coatings Technology · 2000 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +10

Deposition of amorphous carbon using a shunting arc discharge

Ken Yukimura, Motoya Kumagai, Masao Kumagai et al. · Surface and Coatings Technology · 2003 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +8

Interfacial structure control of cubic boron nitride films prepared by ion-beam assisted deposition

Yuichi Setsuhara, Takayoshi Suzuki, Yasunori Tanaka et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +13

Macroparticles on titanium nitiride thin film prepared by cathodic-arc plasma-based ion implantation and deposition

Masao Kumagai, Ken Yukimura, Eiji Kuze et al. · Surface and Coatings Technology · 2003 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +14