Concepedia

M. Li

ML

1

Publications

16

Citations

1

H-Index

1991

Active since

Affiliations

University of North Carolina at Chapel Hill(Current)

M. Li is an author at University of North Carolina at Chapel Hill specializing in applied physics, microfabrication, and integrated circuits.

Top concepts

ChemistryEngineeringAtomic PhysicsApplied PhysicsSurface ScienceMicrofabricationIntegrated CircuitsElectrical Engineering

Publications per year

1991–1991

1

Publications

1

Studies of hydrogen ion beam cleaning of silicon dioxide from silicon using <i>in</i> <i>situ</i> spectroscopic ellipsometry and x-ray photoelectron spectroscopy

Yi Hu, K. A. Conrad, M. Li et al. · Applied Physics Letters · 1991 · 16 citations

Engineering, Low-energy Ion Source, Ion Beam Instrumentation +16

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