Concepedia

Satoshi Shimonishi

SS

2

Publications

105

Citations

2

H-Index

1995

Active since

Affiliations

Hitachi (Japan)(Current)

Satoshi Shimonishi is an author at Hitachi (Japan) specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringNanoelectronicsSurface ScienceMicrofabricationCrystalline DefectsIntegrated Circuits

Publications per year

1995–2004

2

Publications

2

Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi et al. · Japanese Journal of Applied Physics · 2004 · 80 citations

Engineering, Silicon-on-nothing Structure, Micro-optical Component +21

Eliminating Metal‐Sputter Contamination in Ion Implanter for Low‐Temperature‐Annealed, Low‐Reverse‐Bias‐Current Junctions

Kazuo Tomita, Tomohiro Migita, Satoshi Shimonishi et al. · Journal of The Electrochemical Society · 1995 · 25 citations

Point Defects, Engineering, Ion Implanter +16

Rows per page

1–2 of 2