Statistics
Publications
5
Citations
114
H-Index
5
Active since
1993
Affiliations
University of Oklahoma(Current)
Gamini Dharmasena is an author at University of Oklahoma specializing in engineering, natural sciences, and spectroscopy.
Publications per year
1993–2000
5
5
Atomic fluorine beam etching of silicon and related materials
Preston R. Larson, K. Copeland, Gamini Dharmasena et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 14 citations
Engineering, Electron-beam Lithography, Silicon On Insulator +21
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