Concepedia

Rik Vangheluwe

RV

2

Publications

39

Citations

2

H-Index

2004

Active since

Affiliations

Eindhoven University of Technology(Current)

Rik Vangheluwe is an author at Eindhoven University of Technology specializing in applied physics, engineering, and surface science.

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Publications per year

2004–2005

2

Publications

2

P‐111: A Thin Film Encapsulation Stack for PLED and OLED Displays

F.J.H. van Assche, Rik Vangheluwe, Jochen Maes et al. · SID Symposium Digest of Technical Papers · 2004 · 22 citations · Full text

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High rate (∼3 nm/s) deposition of dense silicon nitride films at low substrate temperatures (<150 °C) using the expanding thermal plasma and substrate biasing

F.J.H. van Assche, W. M. M. Kessels, Rik Vangheluwe et al. · Thin Solid Films · 2005 · 17 citations

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