Lukang Wang

Femtosecond laser micromachining in combination with ICP etching for 4H–SiC pressure sensor membranes

Lukang Wang, You Zhao · Ceramics International · 2020 · 38 citations

Advanced Laser Processing, Engineering, Micromachines +8

Design and Fabrication of Bulk Micromachined 4H-SiC Piezoresistive Pressure Chips Based on Femtosecond Laser Technology

Lukang Wang, You Zhao · Micromachines · 2021 · 30 citations · Full text

Development of Laser-Micromachined 4H-SiC MEMS Piezoresistive Pressure Sensors for Corrosive Environments

Lukang Wang, You Zhao, Yu Yang et al. · IEEE Transactions on Electron Devices · 2022 · 25 citations

Materials Science, Engineering, Micromachines +15

Experimental Investigation on Ablation of 4H-SiC by Infrared Femtosecond Laser

Lukang Wang, You Zhao · Micromachines · 2022 · 24 citations · Full text

Two-step femtosecond laser etching for bulk micromachining of 4H–SiC membrane applied in pressure sensing

Lukang Wang, You Zhao · Ceramics International · 2022 · 23 citations

Advanced Laser Processing, Engineering, Micromachines +9