Concepedia

Moselund Kirsten

MK

Statistics

Publications

4

Citations

89

H-Index

4

Active since

1995

Affiliations

Uppsala University(Current)

Fraunhofer Institute for Silicon Technology

Universitat de Barcelona

Moselund Kirsten is an author at Uppsala University specializing in materials engineering, engineering, and thin films.

Publications per year

1995–2005

4

Publications

4

Deposition of thick doped polysilicon films with low stress in an epitaxial reactor for surface micromachining applications

Moselund Kirsten, B. Wenk, Fredric Ericson et al. · Thin Solid Films · 1995 · 33 citations

Engineering, Materials Engineering, Materials Science +14

Thick polycrystalline silicon for surface-micromechanical applications: deposition, structuring and mechanical characterization

Peter J. de Lange, Moselund Kirsten, W. Riethmüller et al. · Sensors and Actuators A Physical · 1996 · 32 citations

Engineering, Materials Engineering, Materials Science +16

Stress gradient and structural properties of atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors

M.S. Benrakkad, J.M. López-Villegas, Josep Samitier et al. · Sensors and Actuators A Physical · 1995 · 12 citations

Engineering, Materials Engineering, Materials Science +17

Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization

Peter J. de Lange, Moselund Kirsten, W. Riethmüller et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 12 citations

Engineering, Materials Engineering, Materials Science +17

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