Concepedia

M. Kehrle

MK

2

Publications

102

Citations

2

H-Index

1997

Active since

Affiliations

Ludwig-Maximilians-Universität München(Current)

M. Kehrle is an author at Ludwig-Maximilians-Universität München specializing in nanofabrication, nanotechnology, and engineering.

Top concepts

MicroscopyEngineeringNanotechnologyApplied PhysicsNanofabricationSurface ScienceMaterial ScienceThin FilmsNanoelectronicsNanolithography

Publications per year

1997–1998

2

Publications

2

Fabrication of Ti/TiOx tunneling barriers by tapping mode atomic force microscopy induced local oxidation

Bernd Irmer, M. Kehrle, H. Lorenz et al. · Applied Physics Letters · 1997 · 81 citations

Materials Science, Engineering, Tunneling Microscopy +15

Nanolithography by non-contact AFM-induced local oxidation: fabrication of tunnelling barriers suitable for single-electron devices

Bernd Irmer, M. Kehrle, H. Lorenz et al. · Semiconductor Science and Technology · 1998 · 21 citations

Engineering, Electron-beam Lithography, Microscopy +22

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