T. Lardin

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Active since

1997

Affiliations

Laboratoire d'Électronique des Technologies de l'Information(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

CEA Grenoble

Applied Materials (United States)

T. Lardin is an author at Laboratoire d'Électronique des Technologies de l'Information specializing in electrical engineering, engineering, and semiconductor devices.

Publications per year

1997–2018

Publications

Breakthroughs in 3D Sequential technology

Laurent Brunet, C. Fenouillet-Béranger, P. Batude et al. · 2018 · 52 citations

Engineering, Electrical Engineering, Materials Science +13

Cleaning after silicon oxide CMP

F. Tardif, I. Constant, T. Lardin et al. · Microelectronic Engineering · 1997 · 13 citations

Architecture, Electrical Engineering, Semiconductor Devices +3

Comparison of direct-total-reflection X-ray fluorescence, sweeping-total-reflection X-ray fluorescence and vapor phase decomposition-total-reflection X-ray fluorescence applied to the characterization of metallic contamination on semiconductor wafers

Adrien Danel, Nicolas Cabuil, T. Lardin et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2008 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +16

New Aspects of the Diluted Dynamic Clean Process

F. Tardif, T. Lardin, A. Maciejny et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1998 · 11 citations

Engineering, Chemical Engineering, Process Dynamics +2

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