Concepedia

Heribert Weber

HW

2

Publications

25

Citations

2

H-Index

2003

Active since

Affiliations

Robert Bosch (Germany)(Current)

Heribert Weber is an author at Robert Bosch (Germany) specializing in microfabrication, engineering, and sensor design.

Top concepts

SensorsEngineeringSensor DesignMicrofabricationSensor TechnologyBiomedical SensorsBiomedical EngineeringElectrical Engineering

Publications per year

2003–2009

2

Publications

2

Novel Technology for Capacitive Pressure Sensors with Monocrystalline Silicon Membranes

Kathrin Knese, S. Armbruster, Heribert Weber et al. · 2009 · 14 citations

Electrical Engineering, Biomedical Sensors, Monocrystalline Silicon Membranes +15

Monocrystalline Si membranes for pressure sensors fabricated by a novel surface micromachining process using porous silicon

H. Artmann, F. Schaefer, Gerhard Lammel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 11 citations

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