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Chuei-Fu Chue

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Publications

1

Citations

13

H-Index

1

Active since

2009

Affiliations

Nanya Technology (Taiwan)(Current)

Chuei-Fu Chue is an author at Nanya Technology (Taiwan) specializing in computer-aided design, electronic design automation, and instrumentation.

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Publications per year

2009–2009

1

Publications

1

Optimization of alignment/overlay sampling and marker layout to improve overlay performance for double patterning technology

Chuei-Fu Chue, Tsann-Bim Chiou, Chun-Yen Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations

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