Hiroshi Nagaike

Particle Reduction and Control in Plasma Etching Equipment

Tsuyoshi Moriya, Hiromasa Nakayama, Hiroshi Nagaike et al. · IEEE Transactions on Semiconductor Manufacturing · 2005 · 42 citations

Engineering, Electrical Engineering, Physics +17

A base-catalyzed Diels–Alder reaction of N-tosyl-3-hydroxy-2-pyridone

Hiroaki Okamura, Hiroshi Nagaike, Tetsuo Iwagawa et al. · Tetrahedron Letters · 2000 · 29 citations

Natural Sciences, Chemistry, Catalysis +4

Dynamical properties of acoustic emission by anomalous discharge in plasma processing system

Takaya Miyano, Tsuyoshi Moriya, Hiroshi Nagaike et al. · Journal of Physics D Applied Physics · 2008 · 18 citations

Natural Sciences, Electrical Engineering, Physics +16

Radiation grafting of styrene onto polyethylene

Yoshinobu Izumi, Hiroshi Nagaike, Shigehiko Tabuse et al. · Radiation Physics and Chemistry · 2001 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +12

Reduction of particle contamination in an actual plasma etching process

Tsuyoshi Moriya, Toru Murakami, Hiromasa Nakayama et al. · 2005 · 16 citations

Engineering, Physics, Plasma Physics +14