Concepedia

M. Ferri

MF

15

Publications

376

Citations

13

H-Index

2003

Active since

Affiliations

Institute for Microelectronics and Microsystems(Current)

University of Milano-Bicocca

University of Cambridge

National Interuniversity Consortium for the Physical Sciences of Matter

University of Florence

M. Ferri is an author at Institute for Microelectronics and Microsystems specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMaterial ScienceMicrofabricationNanotechnologySensor TechnologyMechanical EngineeringSensorsPhysics

Publications per year

2003–2021

15

Publications

15

Transient enhanced diffusion of arsenic in silicon

S. Solmi, M. Ferri, M. Bersani et al. · Journal of Applied Physics · 2003 · 57 citations · Full text

Materials Science, Semiconductors, Semiconductor Technology +12

Carbon-Cap for Ohmic Contacts on Ion-Implanted 4H–SiC

Roberta Nipoti, F. Mancarella, F. Moscatelli et al. · Electrochemical and Solid-State Letters · 2010 · 52 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Luca Belsito, M. Ferri, F. Mancarella et al. · Sensors and Actuators A Physical · 2016 · 34 citations · Full text

Wafer-level Vacuum, Engineering, Mems Resonators +11

Arsenic uphill diffusion during shallow junction formation

M. Ferri, S. Solmi, A. Parisini et al. · Journal of Applied Physics · 2006 · 33 citations

Engineering, Semiconductor Nanostructures, Semiconductors +17

Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology

Enrico Vannacci, Luca Belsito, F. Mancarella et al. · Biomedical Microdevices · 2014 · 25 citations

Medical Ultrasound, Engineering, Microscopy +12

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