Concepedia

K. Fujino

KF

10

Publications

306

Citations

10

H-Index

1990

Active since

Affiliations

Semiconductor Energy Laboratory (Japan)(Current)

K. Fujino is an author at Semiconductor Energy Laboratory (Japan) specializing in engineering, materials science, and surface science.

Top concepts

EngineeringMaterial ScienceSurface ScienceChemical EngineeringThin FilmsApplied PhysicsChemistryAtmospheric ScienceOzoneAir Pollution

Publications per year

1990–2024

10

Publications

10

Silicon Dioxide Deposition by Atmospheric Pressure and Low‐Temperature CVD Using TEOS and Ozone

K. Fujino, Yuko Nishimoto, N. Tokumasu et al. · Journal of The Electrochemical Society · 1990 · 119 citations

Thin Film Physics, Engineering, Atmospheric Pressure +16

Space sails for achieving major space exploration goals: Historical review and future outlook

Maximilien Berthet, James Schalkwyk, Onur Çelik et al. · Progress in Aerospace Sciences · 2024 · 39 citations · Full text

Naval Architecture, Space Sails, Space Vehicle +11

Dependence of Deposition Characteristics on Base Materials in TEOS and Ozone CVD at Atmospheric Pressure

K. Fujino, Yuko Nishimoto, N. Tokumasu et al. · Journal of The Electrochemical Society · 1991 · 34 citations

Engineering, Integrated Circuits, Thin Film Process Technology +25

Doped Silicon Oxide Deposition by Atmospheric Pressure and Low Temperature Chemical Vapor Deposition Using Tetraethoxysilane and Ozone

K. Fujino, Yuko Nishimoto, N. Tokumasu et al. · Journal of The Electrochemical Society · 1991 · 22 citations

Doped Silicon Oxides, Engineering, Atmospheric Pressure +18

Surface Modification of Base Materials for TEOS / O 3 Atmospheric Pressure Chemical Vapor Deposition

K. Fujino, Yuko Nishimoto, N. Tokumasu et al. · Journal of The Electrochemical Society · 1992 · 21 citations · Full text

Engineering, Vacuum Device, Chemical Deposition +20

Rows per page

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