Concepedia

Katsumi Ohomori

KO

Statistics

Publications

2

Citations

28

H-Index

2

Active since

2013

Affiliations

Osaka Research Institute of Industrial Science and Technology(Current)

Tokyo Ohka Kogyo (Japan)

The University of Osaka

Katsumi Ohomori is an author at Osaka Research Institute of Industrial Science and Technology specializing in polymer chemistry, chemistry, and engineering.

Top concepts

Publications per year

2013–2014

2

Publications

2

Acid generation mechanism in anion-bound chemically amplified resists used for extreme ultraviolet lithography

Yoshitaka Komuro, Hiroki Yamamoto, Kazuo Kobayashi et al. · Japanese Journal of Applied Physics · 2014 · 16 citations

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Electron and Hole Transfer in Anion-Bound Chemically Amplified Resists Used in Extreme Ultraviolet Lithography

Yoshitaka Komuro, Hiroki Yamamoto, Yoshiyuki Utsumi et al. · Applied Physics Express · 2013 · 12 citations

, , +21

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