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Modeling and fabrication of single cantilever piezoelectric microgenerator with optimized Zno active layer

Materials ScienceElectrical EngineeringEnergy HarvestingEngineeringMicrofabricationPiezoelectric NanogeneratorsMechanical EngineeringNano Electro Mechanical SystemPiezoelectric MaterialsPiezoelectricityPiezoelectric MaterialMicroelectronicsMicro-electromechanical System