Fraunhofer-Publica (Fraunhofer-Gesellschaft) · 2008 · 27 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsPhotovoltaic DevicesPhotovoltaic MaterialsSolar Cell MaterialsSolar CellsSolar Energy SystemsSolar Photovoltaic SystemsCrystalline Silicon Solar CellsHydrogen PassivationHydrogenationPassivation LayersPlasma PassivationSilicon PassivationSilicon Solar CellsThin-film Solar Cells
This paper presents the beneficial effects of Remote Plasma Hydrogen passivation (RPHP) on Recrystallized Wafer-Equivalent (RexWE) solar cells. We varied the dominating parameters of the RPHP process and analysed their effect on the RexWE solar cell parameters. A low and a high temperature regime were investigated for the RPHP. Both showed remarkable results in terms of Voc, FF, Jsc and boosts. The striking benefit of a newly optimised hydrogenation process increased the Voc from 454 to 54 mV and the efficiency from 4.0 to 6.0% by means of a 45 min process at 450°C.
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