Publication | Closed Access
KrF Laser Optimization
16
Citations
34
References
1987
Year
EngineeringLaser ScienceLaser-plasma InteractionLaser ApplicationsLaser Plasma PhysicSuper-intense LasersHigh-power LasersElectron-beam-pumped Krf LaserElectron OpticLaser Plasma PhysicsKrf Laser Optimization10-Kj Large AperturePhotonicsPhysicsApodized AperturesLaser Beam PropagationOutput FluenceLaser DesignAdvanced Laser ProcessingApplied PhysicsGas Lasers
The optimization of a 10-kJ large aperture (1- × 1-m) electron-beam-pumped KrF laser is investigated theoretically. Model calculations in zero and one dimension have been performed over extensive ranges in a few parameters for optimization of output fluence. A practical procedure for one-dimensional modeling is given, and significant differences between calculations performed in zero and one dimension are discussed. Predictions are compared to preliminary experimental results.The model is then applied to a regime of much higher electron energy deposition and total gas pressure. Some aspects of the operation of such a laser are discussed.
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