Journal of Materials Science Materials in Electronics · 2003 · 23 citations · 3 references
Natural SciencesMaterials EngineeringMaterials SciencePhysical ChemistrySurface ChemistryThin FilmsKinetic ModelingSurface KineticsSurface PhysicsSurface Reaction KineticsSurface ReactionsThin-film DepositionDeposition KineticsDeposition Rate EffectsFilm Growth MechanismsThin-film Growth KineticsThin-film Growth Mechanisms
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