Electromagnetic Near-Field Scanning for Microelectronic Test Chip Investigation

Abstract

Abstract — The effects of on-chip decoupling capacitors in the power supply network of a CMOS test-chip on radiated noise are investigated by surface scan measurements. The hardware set-up and the measurement procedure are briefly described. Applying the calibration method, measurements of separate field components are given in absolute form. This permits one to compare and interpret surface scan images of the electromagnetic field in terms of electric charge and current distribution. The analysis of scanning results allows one to evaluate core optimisation efficiency and discovery of parasitic effects within the chip. Finally, a short overview about the status of near-field scanning techniques and their challenges is presented. I.